000 00343nam a2200145Ia 4500
654 _aELN
100 _aLee.H.H.
_94115
250 _a1st Ed.
080 _aLEE
942 _cBB
245 _aFundamentals Of Microelectronics Processing.
260 _bTata McGraw-Hill Publishing Company Limited
_c1990
300 _a564p.
999 _c49586
_d49586
655 _aF-01
546 _aText in English
041 _aeng
300 _c20.5 cm.