| 000 | 00372nam a2200145Ia 4500 | ||
|---|---|---|---|
| 654 | _aCOMP | ||
| 100 | _aHus, Tai Ran | ||
| 250 | _a1st Ed. | ||
| 020 | _a9780070487093 | ||
| 245 | _aMEMS and Microsystems Design and Manufacturing | ||
| 260 |
_bTata McGraw-Hill Publishing Company Limited _c2002 |
||
| 082 |
_bHUS _a621.381 |
||
| 300 | _axii, 436p. | ||
| 999 |
_c26973 _d26973 |
||
| 300 | _c24 cm. | ||
| 655 | _aF-14 | ||
| 041 | _aeng | ||
| 546 | _aText in English | ||