000 00393nam a2200145Ia 4500
654 _aMECH
100 _aLieberman, Michael A. & Lichtenberg, Allan J.
250 _a2nd Ed.
020 _a0471720011
245 _aPrinciples of Plasma Discharges and Materials Processing
260 _bJohn Wiley and Sons, Inc
_c2005
082 _bLIE
_a620.11
300 _axxxv, 757p.
999 _c19251
_d19251
300 _c24 cm.
655 _aM-35
041 _aeng
546 _aText in English