000 00341nam a2200145Ia 4500
654 _aMECH
100 _aLiu, Change
250 _a1st Ed.
020 _a013199204x
245 _aFoundations of MEMS
260 _bPearson India Education Service Pvt. Ltd.
_c2006
082 _bLIU
_a621.31042
300 _axxi, 530p.
999 _c16625
_d16625
300 _c24 cm.
655 _aM-26
041 _aeng
546 _aText in English