000 00416nam a2200145Ia 4500
654 _aMECH
100 _aTaniguchi, N.
250 _a1st Ed.
020 _a9780195693270
245 _aNanotechnology : Integrated Processing Systems For Ultra - Precision & Ultra - Fine Products
260 _bOxford University Press
_aNew Delhi
_c2008
082 _bTAN
_a620.5
300 _axiv, 406p.
999 _c15918
_d15918
300 _c24 cm.
655 _aM-26
041 _aeng
546 _aText in English