Ghandhi, S.K. VLSI Fabrication Principles Silicon and Gallium Arsenide - 2nd Ed. - New Delhi Wiley India Pvt. Ltd. 2011 - xx, 834p. 23 cm. Text in English ISBN: 9788126517909 Subjects--Facted Index Terms: ELN Index Terms--Genre/Form: F-02 Dewey Class. No.: 621.38043 / GHA