TY  - BOOK
AU  - Zant, P.V.
TI  - Microchip Fabrication : A Practical Guide to Semiconductor Processing
SN  - 0071432418
U1  - 621.38152 
PY  - 2004///
PB  - McGraw Hill International Book Company
KW  - ELN
KW  - F-10
ER  -