TY  - BOOK
AU  - Johnstone, R. W. & Parameswaran, M.
TI  - An Introduction to Surface-Micromachining
SN  - 9781402080203
U1  - 620.5 
PY  - 2004///
CY  - Boston
PB  - Kluwer Academic Publishers
KW  - MECH
KW  - M-26
ER  -