Johnstone, R. W. & Parameswaran, M. <br/><br/>
An Introduction to Surface-Micromachining 

 - 1st Ed. 
 - Boston  Kluwer Academic Publishers  2004 
 - x, 186p.  24 cm. 
<br/><br/><br/>Text in English 
<br/><br/><label>ISBN: </label>9781402080203 
<br/><br/><label>Subjects--Facted Index Terms: </label><br/>MECH
<br/><br/><label>Index Terms--Genre/Form: </label><br/>M-26
<br/><br/><label>Dewey Class. No.: </label>620.5  / JOH