TY  - BOOK
AU  - Frangi, A.; Cercignani, C.; Mukherjee, S. & Aluru, N.
TI  - Advances in Multiphysics Simulation and Experimental Testing of MEMS
SN  - 9781860948626
U1  - 621.3 
PY  - 2008///
PB  - Imperial College Press
KW  - COMP
KW  - F-13
ER  -