Frangi, A.; Cercignani, C.; Mukherjee, S. & Aluru, N. Advances in Multiphysics Simulation and Experimental Testing of MEMS - 1st Ed. - Imperial College Press 2008 - x, 489p. 23 cm. Text in English ISBN: 9781860948626 Subjects--Facted Index Terms: COMP Index Terms--Genre/Form: F-13 Dewey Class. No.: 621.3 / FRA