TY  - BOOK
AU  - Madou, M.J.
TI  - Fundamentals of Microfabrication The Science of Miniaturization
SN  - 0849308267
U1  - 621.3817 
PY  - 2012///
CY  - New Delhi
PB  - CRC Press
KW  - MECH
KW  - M-26
ER  -