Madou, M.J. <br/><br/>
Fundamentals of Microfabrication The Science of Miniaturization 

 - 2nd Ed. 
 - New Delhi  CRC Press  2012 
 - x,723p.  28 cm. 
<br/><br/><br/>Text in English 
<br/><br/><label>ISBN: </label>0849308267 
<br/><br/><label>Subjects--Facted Index Terms: </label><br/>MECH
<br/><br/><label>Index Terms--Genre/Form: </label><br/>M-26
<br/><br/><label>Dewey Class. No.: </label>621.3817  / MAD