TY  - BOOK
AU  - Campbell, S. A.
TI  - The Science and Engineering of : Microelectronic Fabrication
SN  - 9780198084808
U1  - 621.3817 
PY  - 2012///
CY  - New York
PB  - Oxford University Press
KW  - ELEC
KW  - F-10
ER  -