TY  - BOOK
AU  - Lieberman, Michael A. & Lichtenberg, Allan J.
TI  - Principles of Plasma Discharges and Materials Processing
SN  - 0471720011
U1  - 620.11 
PY  - 2005///
PB  - John Wiley and Sons, Inc
KW  - MECH
KW  - M-35
ER  -