Liu, Change <br/><br/>
Foundations of MEMS 

 - 1st Ed. 
 -  Pearson India Education Service Pvt. Ltd.  2006 
 - xxi, 530p.  24 cm. 
<br/><br/><br/>Text in English 
<br/><br/><label>ISBN: </label>013199204x 
<br/><br/><label>Subjects--Facted Index Terms: </label><br/>MECH
<br/><br/><label>Index Terms--Genre/Form: </label><br/>M-26
<br/><br/><label>Dewey Class. No.: </label>621.31042  / LIU