TY  - BOOK
AU  - Hus, Tai Ran
TI  - MEMS and Microsystems : Design and Manufacture
SN  - 0072393912
U1  - 621.381 
PY  - 2002///
PB  - Tata McGraw-Hill Publishing Company Limited
KW  - ELN
KW  - F-14
ER  -