Hus, Tai Ran <br/><br/>
MEMS and Microsystems : Design and Manufacture 

 - 1st Ed. 
 -  Tata McGraw-Hill Publishing Company Limited  2002 
 - xii, 436p.  24 cm. 
<br/><br/><br/>Text in English 
<br/><br/><label>ISBN: </label>0072393912 
<br/><br/><label>Subjects--Facted Index Terms: </label><br/>ELN
<br/><br/><label>Index Terms--Genre/Form: </label><br/>F-14
<br/><br/><label>Dewey Class. No.: </label>621.381  / HUS